Innovative Oxide Transistor Satisfying Performance and Reliability Simultaneously by Understanding of Physics and Materials Properties

Guided by a comprehensive analysis of accumulation mode transistor physics and oxide semiconductor materials properties, we demonstrate an innovative oxide semiconductor transistor structure and process flow that break the constraint between performance and reliability observed in conventional InGaZnO4 (IGZO) transistors. The newly proposed 10 nm innovative IGZO transistor features high on-current, high extrinsic mobility (20 cm2V-1s-1), near-zero hysteresis, and only 15 mV Vt shift after positive-bias-stress (PBS) of 3 MV/cm stress for 1000s at room temperature.