Vacancy-mediated nitrogen diffusion and aggregation via high-fluence electron beam irradiation in HPHT synthesized diamond crystal

The negatively charged nitrogen vacancy (NV-) center in diamond is a promising point defect for highly sensitive quantum sensing. The formation of high-density NV- centers is essential for improving sensitivity. We performed room-temperature electron beam irradiation (EBI) and annealing on nitrogen-doped high-pressure high-temperature diamond crystals, aiming to convert all substitutional nitrogen into NV structures by increasing EBI fluence. While the Ns0 to NV0 and NV- conversion process dominated at low EBI fluences, in a high-fluence region, NV0 and NV- center and Ns0 and Ns+ concentrations decreased with increasing EBI fluence, indicating the formation of unknown nitrogen-related defects such as the H3 center, which is a nitrogen and vacancy aggregation defect. Although H3 centers were observed at high EBI fluence, their annealing temperature of 1375 ± 25 °C was lower than the typically reported temperatures over 1600 °C. We attribute this low-temperature formation to vacancy-mediated nitrogen diffusion and aggregation.