We present limits on the spin-independent interaction cross section of dark matter particles with silicon nuclei, derived from data taken with a cryogenic calorimeter with 0.35 g target mass operated in the CRESST-III experiment. A baseline nuclear recoil energy resolution of eV, currently the lowest reported for macroscopic particle detectors, and a corresponding energy threshold of eV have been achieved, improving the sensitivity to light dark matter particles with masses below 160 MeV/c by a factor of up to 20 compared to previous results. We characterize the observed low energy excess, and we exclude noise triggers and radioactive contaminations on the crystal surfaces as dominant contributions.

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