The properties of dielectric and piezoelectric oxides are determined by their processing history, crystal structure, chemical composition, microstructure, dopants (or defect) distribution, and defect kinetics. These materials are essential in a diverse range of applications including aerospace, medical, military, transportation, power engineering, and communication, where they are used as ceramic discs, thick and thin films, multilayer devices, etc. Significant advances in understanding the materials, processing, properties, and reliability of these materials have led to their widespread use in consumer electronics, military, and aerospace applications. This review delves into electrical degradation in dielectrics and piezoelectrics, focusing on defect chemistry and key characterization techniques. It also provides a detailed discussion of various spectroscopic, microscopic, and electronic characterization techniques essential for analyzing defects and degradation mechanisms.

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