Kagome lattices have garnered substantial interest because their band structure consists of topological flat bands and Dirac cones. The RMnSn (R = rare earth) compounds are particularly interesting because of the existence of large intrinsic anomalous Hall effect (AHE) which originates from the gapped Dirac cones near the Fermi level. This makes RMnSn an outstanding candidate for realizing the high-temperature quantum anomalous Hall effect. The growth of RMnSn thin films is beneficial for both fundamental research and potential applications. However, most of the studies on RMnSn have focused on bulk crystals so far, and the synthesis of RMnSn thin films has not been reported so far. Here we report the atomic layer molecular beam epitaxy growth, structural and magnetic characterizations, and transport properties of ErMnSn and TbMnSn thin films. It is especially noteworthy that TbMnSn thin films have out-of-plane magnetic anisotropy, which is important for realizing the quantum anomalous Hall effect. Our work paves the avenue toward the control of the AHE using devices patterned from RMnSn thin films.

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