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Optical properties of the short period {CdO/ZnO} superlattices grown by plasma assisted MBE were analyzed. The superlattice (SLs) structures were successfully obtained at different growth temperatures from 360 to 550 °C. Interestingly, the growth temperature of the SLs influences quality of multilayers and also optical properties of these structures. After annealing at 900°C by rapid thermal method various defect luminescence located at different energetic positions , were detected, and intensity of luminescence strongly depends on applied growth temperature.

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