The vacuum energy-momentum tensor (EMT) and the vacuum energy corresponding to massive scalar field on space-time with boundary condition involving a dimensional parameter () are found. The dependent on the cavity size Casimir energy is a uniquely determinable function of mass , size and “skin-depth” . This energy includes the “bulk” and the surface (potential energy) contributions. The latter dominates when . Taking the surface potential energy into account is crucial for the coincidence between the derivative $-\d \wt E_{C}/\d lll\wt E_C$ and the bulk contribution to it are interconnected through Legendre transformation, in which the quantity is conjugate to the vacuum surface energy multiplied by . The surface singularities of the vacuum EMT do not depend on and, for even , or , possess finite interpretation. The corresponding vacuum energy is finite and retains known analytical dependence on the dimension .

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