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The reflectance difference (RD) as a function of film thickness was measured during Pb deposition on Si(111)-(6x6)Au surface at 105 K. The oblique incident s- and p-polarized light with energy range 0.25-0.60 eV was used. The component of the dielectric function tensor parallel to the surface was determined from the data of experiments and it oscillation due to quantum size effects (QSE) with period of 2 ML within the Pb monolayer-by-monolayer growth was observed.

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