A kiloelectron-volt ultrafast electron micro-diffraction apparatus using low emittance semiconductor photocathodes

We report the design and performance of a time-resolved electron diffraction apparatus capable of producing intense bunches with simultaneously single digit micron probe size, long coherence length, and $200$ fs rms time resolution. We measure the 5d (peak) beam brightness at the sample location in micro-diffraction mode to be $7 \times 10^{13}
$\mathrm{A}$/$\text{m}$^2$\text{-rad}$^2$. To generate high brightness electron bunches, the system employs high efficiency, low emittance semiconductor photocathodes driven with a wavelength near the photoemission threshold at a repetition rate up to 250 kHz. We characterize spatial, temporal, and reciprocal space resolution of the apparatus. We perform proof-of-principle measurements of ultrafast heating in single crystal Au samples and compare experimental results with simulations that account for the effects of multiple-scattering.