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We investigate the formation of lattice matched single-crystalline FeSi/GaAs(001) ferromagnet/semiconductor hybrid structures by Volmer-Weber island growth, starting from the epitaxial growth of isolated FeSi islands up to the formation of continuous films as a result of island coalescence. We find coherent defect-free layers exhibiting compositional disorder near the FeSi/GaAs-interface for higher growth rates, whereas they are fully ordered for lower growth rates.

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