We report ultra-low intrinsic magnetic damping in CoFe heterostructures, reaching the low regime at room temperature. By using a broadband ferromagnetic resonance technique, we extracted the dynamic magnetic properties of several CoFe-based heterostructures with varying ferromagnetic layer thickness. By estimating the eddy current contribution to damping, measuring radiative damping and spin pumping effects, we found the intrinsic damping of a 26,nm thick sample to be $$\alpha_{} \lesssim 3.18\times10^{-4}$. Furthermore, using Brillouin light scattering microscopy we measured spin-wave propagation lengths of up to in a 26 nm thick CoFe heterostructure at room temperature, which is in excellent agreement with the measured damping.

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