Realizing $Q$ > 300,000 in diamond microdisks for optomechanics via etch optimization

Nanophotonic structures in single–crystal diamond (SCD) that simultaneously confine and co-localize photons and phonons are highly desirable for applications in quantum information science and optomechanics. Here we describe an optimized process for etching SCD microdisk structures designed for optomechanics applications. This process allows the optical quality factor, $Q$, of these devices to be enhanced by a factor of 4 over previous demonstrations to $Q\sim 335,000$, which is sufficient to enable sideband resolved coherent cavity optomechanical experiments. Through analysis of optical loss and backscattering rates we find that $Q$ remains limited by surface imperfections. We also describe a technique for altering microdisk pedestal geometry which could enable reductions in mechanical dissipation.