The parallel-magnetic-field dependence of the superconducting transition temperature is studied for ultrathin films of In, Bi, and Al grown on GaAs(110). In the case of In films in the monolayer regime, exhibits a quadratic-like dependence, which is one order of magnitude stronger than that previously observed in monolayer Pb films by the present authors [Phys. Rev. Lett. 111, 057005 (2013)]. The results are well reproduced by a model developed for an inhomogeneous two-dimensional superconducting state in the presence of a moderate Rashba spin-orbit interaction. The Rashba spin splitting is estimated to be 0.04 eV, which is much smaller than that expected for monolayer Pb films. In a few-monolayer Bi film, the suppression of with increasing is comparable to that in monolayer Pb films. On the other hand, much stronger suppression, which is attributed to the Pauli paramagnetic effect, was observed for the Al film.

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