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Laser writing with ultrashort pulses provides a potential route for the manufacture of three-dimensional wires, waveguides and defects within diamond. We present a transmission electron microscopy (TEM) study of the intrinsic structure of the laser modifications and reveal a complex distribution of defects. Electron energy loss spectroscopy (EELS) indicates that the majority of the irradiated region remains as bonded diamond. Electrically-conductive paths are attributed to the formation of multiple nano-scale, -bonded graphitic wires and a network of strain-relieving micro-cracks.

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