Nearly quantum limited nanoSQUIDs based on cross-type Nb/AlOx/Nb junctions

We report on the development of nearly quantum limited SQUIDs with miniature pickup loop dimensions. The implemented high quality and low capacitance cross-type Nb/AlOx/Nb Josephson junctions offer large $I_C{R}_N$-products and therefore enable an exceptional low noise level of the SQUIDs. Devices with loop dimensions of 1 {\mu}m exhibit white flux noise levels as low as $45 n{\Phi}_0/Hz^{1/2}$ corresponding to an energy resolution {\epsilon} of about 1 h at 4.2 K, with h being Plancks constant. Moreover, the large usable voltage swings of the devices of about 300 {\mu}V allow highly sensitive and easy single-stage operation while exploring nearly the intrinsic noise of the SQUIDs, beneficial e.g. for sensor arrays in SQUID microscopy.