We study diffusion-controlled single-species annihilation with a finite number of particles. In this reaction-diffusion process, each particle undergoes ordinary diffusion, and when two particles meet, they annihilate. We focus on spatial dimensions where a finite number of particles typically survive the annihilation process. Using the rate equation approach and scaling techniques we investigate the average number of surviving particles, , as a function of the initial number of particles, . In three dimensions, for instance, we find the scaling law in the asymptotic regime . We show that two time scales govern the reaction kinetics: the diffusion time scale, , and the escape time scale, $\tau\sim N^{4/3}$. The vast majority of annihilation events occur on the diffusion time scale, while no annihilation events occur beyond the escape time scale.

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