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We have determined the growth mode of graphene on SiC(0001) and SiC(000-1) using ultra-thin, isotopically-labeled Si13C `marker layers’ grown epitaxially on the Si12C surfaces. Few-layer graphene overlayers were formed via thermal decomposition at elevated temperature. For both surface terminations (Si-face and C-face), we find that the 13C is located mainly in the outermost graphene layers, indicating that, during decomposition, new graphene layers form underneath existing ones.

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