Laser cooling of a nanomechanical oscillator into its quantum ground state

A patterned Si nanobeam is formed which supports co-localized acoustic and optical resonances that are coupled via radiation pressure. Starting from a bath temperature of T=20K, the 3.68GHz nanomechanical mode is cooled into its quantum mechanical ground state utilizing optical radiation pressure. The mechanical mode displacement fluctuations, imprinted on the transmitted cooling laser beam, indicate that a final phonon mode occupancy of 0.85 ±0.04 is obtained.