Control of thin NbN film superconducting properties by ScN buffer layer

This work investigates the effect of a scandium nitride buffer layer on the superconducting properties of niobium nitride thin films. The use of a ScN buffer layer significantly improves the characteristics of 29 nm thick NbN films: the critical temperature Tc increases from 9 K to 12.5 K, while the resistivity at 20 K decreases from 330 mkOhmcm to 210 mkOhmcm compared to films without a buffer layer. These enhancements are attributed to the better lattice matching between NbN and ScN, which results in a higher quality crystal lattice of the NbN film, as confirmed by transmission electron microscopy and X-ray diffraction data.