Alignment of the ATLAS Inner Detector Tracking System

The ATLAS detector, built at one of the interaction points of the Large Hadron Collider, is operational and has been collecting data from cosmic rays. This paper describes the track based alignment of the ATLAS Inner Detector tracker which was performed using cosmic rays collected in 2008. The alignment algorithms are described and the performance of the alignment is demonstrated by showing the resulting hit residuals and comparing track parameters of upper and lower segments of tracks. The impact of the alignment on physics measurements is discussed.